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MEGA Invited Talk: Innovations in LDV and Micro Optical Sensors

MEGA Invited Talk: Innovations in LDV and Micro Optical Sensors

Abstract: The availability of solid state lasers, and enabling MEMS (or MOEMS) technology, provide the opportunity to create novel optical sensors. In many cases this would not have been feasible with the use of standard fabrication techniques. In recent years, optical MEMS sensors have been developed to measure variety of parameters, including surface speed, flow […]